UHV-compatible Rack and Pinion Transporter
Custom Systems > Additional Custom Systems
The Model DMRAP, UHV compatible two-axis robot can be driven manually using magnetic rotary manipulators from outside the vacuum system, or motorized using UHV compatible stepper motors inside the vacuum system. The Model DMRAP has a full ±190° of rotational motion with better than .01° rotational resolution and repeatability, 0.001" linear resolution and repeatability, and up to 50" delivery distance from the center of the robot. This is designed to handle substrates up to 5 lbs. with minimal droop, The system is bakeable to 200°C. HOME and EXTEND UHV optical limit switches verify positioning.
Motorized units can be provided with our Model ALMCS-2 dual axis stepper motor control system with color touch screen HMI for operation through the front panel of the controller or via RS232 communication.
Substrate paddles of different size and materials available on request.