Custom SystemsCustom Wafer Transfer
Transfer Engineering loadlocks and transfer systems can be customized or modified to fit many requirements where a standard loadlock cannot be used. For non-standard process chambers with an interface other than a SEMI-compatible interface, modifications can be made to the loadlock mounting flange or adapters can be provided. Examples of other variations include adding accessory ports for surface topography measurements within the loadlock chamber or for pre-treatment. A wide variety of chambers with unique sizes and shapes have been provided as well as dual-directional chambers with more than one transfer arm so a substrate can be introduced into one chamber and then into another without removing it from the loadlock. A few customized systems are shown below.