CFF-Based Loadlock and Transfer Systems
A high-vacuum compatible loadlock system is an efficient, cost-effective method of loading substrates into a vacuum chamber without breaking vacuum. Loading the substrate into an introduction-chamber (loadlock) and evacuating the loadlock prior to transferring the substrate into the main chamber saves a significant amount of time in reaching the required operating pressure. Without repeated venting to atmospheric pressure, the main chamber remains cleaner and dryer. There are many unique magnetically-coupled transfer devices available for sample introduction.
Loadlock chambers can be constructed to a user-specified size with choices of materials, mounting flanges, pump and auxiliary ports, windows or blank-offs and transporters. Mounting flanges can be standard CFF, ISO or custom. Shown below are examples of a few of the loadlocks provided using various sized CFF mounting flanges. Each system can be ordered as shown or reconfigured to meet your specific requirements.