loadlock and transfer system
Loadlock/Transfer    CFF-Based

CFF-Based Loadlock and Transfer Systems

A high-vacuum compatible loadlock system is an efficient, cost-effective method of loading substrates into a vacuum chamber without breaking vacuum. Loading the substrate into an introduction-chamber (loadlock) and evacuating the loadlock prior to transferring the substrate into the main chamber saves a significant amount of time in reaching the required operating pressure. Without repeated venting to atmospheric pressure, the main chamber remains cleaner and dryer. There are many unique magnetically-coupled transfer devices available for sample introduction.

Loadlock chambers can be constructed to a user-specified size with choices of materials, mounting flanges, pump and auxiliary ports, windows or blank-offs and transporters. Mounting flanges can be standard CFF, ISO or custom. Shown below are examples of a few of the loadlocks provided using various sized CFF mounting flanges. Each system can be ordered as shown or reconfigured to meet your specific requirements.

precision magnetic manipulator
custom transfer system

2.75" CFF MOUNTING FLANGE
2.75 inch CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
Chamber body Welded stainless steel electropolish finish
Sample loading Quick access door with latches
Door sealed with Viton o-ring
Mounting flange 2.75" CFF
Accessory ports None required
Pump port 2.75" CFF
Sample size Sample holder 7" x 1" x 1"
Magnetic transporter MASLR, PMM-Lite with KLMDA, Motor Drive for motorization
Vacuum level < 5x10-8 Torr with appropriate pumping
Initial application Installed vertically. Holds resist coated wafer pieces (strips) for exposure to EUV radiation and measurement of the outgassing from the resist
CFF Mounting Flange
custom transfer system

4.5" CFF MOUNTING FLANGE
4.5 inch CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
Chamber body Welded stainless steel electropolish finish
Sample loading Quick access, top door
Door sealed with Viton o-ring
Mounting flange 4.5" CFF
Accessory ports 2.75 CFF
Pump port 2.75 CFF
Sample size Holder for 1" x .25" x 1/8" thick
Magnetic transporter Model DBLRP
Vacuum level < 5x10-8 Torr with appropriate pumping
Initial application Introduce samples to perform in-situ spectroscopic ellipsometry of metal films during hydrogen loading and oxidation.
CFF Mounting Flange
custom transfer system

6" CFF MOUNTING FLANGE
6 inch CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
Chamber body Welded stainless steel electropolish finish
Sample loading Quick access, top door
Door sealed with Viton o-ring
Mounting flange 6" CFF
Accessory ports Two NW25
Pump port NW40
Sample size 3" x 3"
Magnetic transporter Model DBLRM with ALDEF, Dynamic End Effector for vertical lift
Vacuum level < 1x10-8 Torr with appropriate pumping
Initial application Deliver 3" x 3" glass substrates into a process module
CFF Mounting Flange 8 inch
custom transfer system

8" CFF MOUNTING FLANGE
8 inch CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
Chamber body Welded stainless steel electropolish finish
Sample loading Quick access, top door
Door sealed with Viton o-ring
Mounting flange 8" CFF
Accessory ports 2.75 CFF
Pump port 4.5 CFF
Sample size 3" sample
Magnetic transporter Model DBLRP with low profile Model VMTEX-2, Transferable Experimental Station for heating capability
Vacuum level < 5x10-8 Torr with appropriate pumping
Initial application Materials research at a university
CFF Mounting Flange 8 inch
custom transfer system

10" CFF MOUNTING FLANGE
10 inch CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
Chamber body Welded stainless steel electropolish finish
Sample loading Quick access door with halogen lamp outgass assembly
Door sealed with Viton o-ring
Mounting flange 10" CFF
Accessory ports (2) 2.75" CFF, (2) 1.33 CFF
Pump port 4.5 CFF
Sample size 4.75" or less
Magnetic transporter Model DBLRP with ALDEF, Dynamic End Effector for vertical lift
Vacuum level < 5x10-8 Torr with appropriate pumping
Initial application Halogen lamps degass loadlock for delivery of substrates to deposition system
CFF Mounting Flange 8 inch
custom transfer system

12" CFF MOUNTING FLANGE
12 inch CFF MOUNTING FLANGE
SPECIFICATIONS AND DESCRIPTION
Chamber body Welded stainless steel electropolish finish
Sample loading Quick access, top door with window
Door sealed with Viton o-ring
Mounting flange 12" CFF
Accessory ports (2) 2.75 tapered, (1) 2.75" CFF
Pump port 4.5 CFF
Sample size 8" wafer
Magnetic transporter Model DBLRP with HD FBA, Model ALDEF-5, Dynamic End Effector for vertical lift and CSS-LR Switching Carriage Stop
Vacuum level < 5x10-8 Torr with appropriate pumping
Initial application Delivered to an OEM to be added to a MoCVD system for wafer introduction.
precision magnetic manipulator
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loadlock and transfer system