TEAM-Mate Loadlock and Transfer Systems
This compact, high-vacuum compatible, single-substrate loadlock system is designed to load wafers or other flat substrates into a SEMI-standard or custom process chamber. This small footprint system can mimic the motions of a robot at significantly less cost.
Typically the TEAM-Mate Loadlock would be mounted to a gate valve attached to a main system chamber. A substrate can then be easily positioned through the large entry door onto the transfer stage in the loadlock chamber. The loadlock would then be evacuated to the desired vacuum level, the gate valve opened and the substrate transferred into the process chamber. This allows repeated substrate loading and unloading without breaking vacuum in the main chamber greatly reducing process time.
Chambers are available for wafers or substrates up to 200mm, 300mm or 450mm. Optional items include custom chambers, vertical lift capability, heavy-duty cart for portability and limit switches. Motion can be operated manually or motorized. Applications include process development, as a manufacturing tool or for low-volume production.
