loadlock and transfer system
Loadlock/Transfer    TEAM-Mate

TEAM-Mate Loadlock and Transfer Systems

This compact, high-vacuum compatible, single-substrate loadlock system is designed to load wafers or other flat substrates into a SEMI-standard or custom process chamber. This small footprint system can mimic the motions of a robot at significantly less cost.

Typically the TEAM-Mate Loadlock would be mounted to a gate valve attached to a main system chamber. A substrate can then be easily positioned through the large entry door onto the transfer stage in the loadlock chamber. The loadlock would then be evacuated to the desired vacuum level, the gate valve opened and the substrate transferred into the process chamber. This allows repeated substrate loading and unloading without breaking vacuum in the main chamber greatly reducing process time.

Chambers are available for wafers or substrates up to 200mm, 300mm or 450mm. Optional items include custom chambers, vertical lift capability, heavy-duty cart for portability and limit switches. Motion can be operated manually or motorized. Applications include process development, as a manufacturing tool or for low-volume production.

precision magnetic manipulator


SPECIFICATIONS AND DESCRIPTION
MODEL TEAM-Mate 200 TEAM-Mate 300 TEAM-Mate 450
Material
Chamber Single machined aluminum block
HV compatible
Metal with Viton O-rings
Single machined aluminum block
HV compatible
Metal with Viton O-rings
Single machined aluminum block
HV compatible
Metal with Viton O-rings
Transfer System All HV Compatible All HV Compatible All HV Compatible
Description
Substrate sizes Up to 200mm Up to 300mm Up to 450mm
Exterior dimension 23.64" x 13.38" x 7.59" 32" x 17.31" x 6.41" 44.51" x 25.4" x 10.4" *
Chamber volume 4.0 Liters 6.5 Liters 23 Liters
Pump port ISO NW40 ISO NW63 ISO NW100
Auxiliary ports Two ISO NW16 Three ISO NW40 Up to three ISO NW40
Weight ~ 49 pounds ~ 60 pounds ~ 120 pounds **
Performance
Transfer distance Up to 12 inches from front flange - User programmable Up to 18.3 inches from front flange - User programmable Up to 22 inches from front flange - User programmable
Positioning accuracy ±0.002 inches ±0.002 inches ±0.002 inches
Motorization Controls
System I/O Pushbutton, RS232 or digital I/O Pushbutton, RS232 or digital I/O Pushbutton, RS232 or digital I/O
Pushbuttons Set Point/Extract/Retract Set Point/Extract/Retract Set Point/Extract/Retract ***
Manual Controls
Manual Operation Hand crank Hand crank Hand crank
Vertical lift/lower Lever Lever Lever
* Z Lift Option adds approximately 2" to height
** Z Lift Option increases weight dependent on model
*** Z Lift Option adds Get & Put capability

TEAM-MateTM Loadlock Patent Pending
Specifications subject to change without notice.
PMM
custom transfer system

DIAGRAM OF TYPICAL 200mm TEAM-MATE LOADLOCK SYSTEM
200mm TEAM-mate LOADLOCK SYSTEM
200mm TEAM-mate LOADLOCK SYSTEM Diagram
PMM
custom transfer system

DIAGRAM OF TYPICAL 300mm TEAM-MATE LOADLOCK SYSTEM
300mm TEAM-mate LOADLOCK SYSTEM
300mm TEAM-mate LOADLOCK SYSTEM Diagram
PMM
custom transfer system

DIAGRAM OF TYPICAL 450mm TEAM-MATE LOADLOCK SYSTEM
45mm TEAM-mate LOADLOCK SYSTEM
450mm TEAM-mate LOADLOCK SYSTEM Diagram
PMM
loadlock transfer

CUSTOM TEAM-MATE SYSTEMS
CUSTOM TEAM-MATE SYSTEMS
Customized TEAM-Mate chambers can accommodate substrates in a wide range of shapes and sizes. The TEAM-Mate valve interface can be modified to mate to a variety of vacuum systems. Download a PDF file of the TEAM-Mate Datasheet and view other custom systems.

precision magnetic manipulator
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loadlock and transfer system