The Carousel-200 is a compact, high-vacuum compatible loadlock and transfer system designed to deliver up to 200mm wafers or other flat substrates from a SEMI-standard cassette into a process chamber. This small footprint system is a clean, cost-effective alternative to other accepted transfer devices.
After a preloaded wafer cassette is inserted into the load chamber, wafers can be repeatedly pulled from the cassette and delivered to the process chamber without breaking vacuum. A unique revolving wafer carrier exchanges wafers between two independently controlled drive mechanisms. These dual drives allow increased throughput as one drive can be removing a wafer from the cassette as the other is delivering a wafer to the process chamber. The load chamber is equipped with an elevator drive assembly. For process chambers without vertical lift, z-lift capability is optional. The Carousel can be configured for SMIF operation.
The Carousel-200 handles up to 200mm wafers, reticles, masks or substrates of varying sizes. Applications include process development, use as a manufacturing tool or for low-volume production.
SPECIFICATIONS AND DESCRIPTION
MODEL
Carousel-200
Material
Chamber
Machined aluminum block - HV compatible Metal with Viton O-rings
Transfer System
All HV Compatible
Description
Wafer/Substrate sizes
Up to 200mm
Wafers/Cassette
Typical standard 25 wafer cassette;
Footprint
24.8 inches x 26 inches
Chamber load opening
10 inch x 12 inch load opening
Interface
MESC Standard or custom
Volume
Main chamber - 22 Liters Main chamber - 23 Liters Main chamber - 13 Liters
Pump port
ISO NW40
Auxiliary ports
Two ISO NW25
Weight
~ 175 pounds
Performance
Transfer distance
Up to 19 inches from front flange - User programmable
Positioning accuracy
±0.005 inches
Wafer Cycle Time
Typical exchange 15 to 20 sec.
Motorization Controls
System I/O Controls
Pushbutton, RS232 or digital I/O
Pushbuttons
Set Point/Extract/Retract
CarouselTM Loadlock Patent Pending
Specifications subject to change without notice.
DIAGRAM OF TYPICAL 200mm CAROUSEL LOADLOCK SYSTEM
CUSTOM Carousel SYSTEMS
Customized Carousel chambers can accommodate substrates in a wide range of shapes and sizes. The Carousel valve interface can be modified to mate to a variety of vacuum systems. Download a PDF file of the Carousel Datasheet here and view other custom systems.
These dual drives allow increased throughput as one drive can be removing a wafer from the cassette as the other is delivering a wafer to the process chamber. The load chamber is equipped with an elevator drive assembly. For process chambers without vertical lift, z-lift capability is optional. The Carousel can be configured for SMIF operation.
