Carousel Loadlock and Transfer Systems
The Carousel-200 is a compact, high-vacuum compatible loadlock and transfer system designed to deliver up to 200mm wafers or other flat substrates from a SEMI-standard cassette into a process chamber. This small footprint system is a clean, cost-effective alternative to other accepted transfer devices.
After a preloaded wafer cassette is inserted into the load chamber, wafers can be repeatedly pulled from the cassette and delivered to the process chamber without breaking vacuum. A unique revolving wafer carrier exchanges wafers between two independently controlled drive mechanisms. These dual drives allow increased throughput as one drive can be removing a wafer from the cassette as the other is delivering a wafer to the process chamber. The load chamber is equipped with an elevator drive assembly. For process chambers without vertical lift, z-lift capability is optional. The Carousel can be configured for SMIF operation.
The Carousel-200 handles up to 200mm wafers, reticles, masks or substrates of varying sizes. Applications include process development, use as a manufacturing tool or for low-volume production.