Wafer and Substrate Introduction Loadlock and Transfer Systems for HV/UHV and Controlled Environments
These high-vacuum compatible loadlocks are designed to load wafers or other substrates into a SEMI-MESC compatible or custom process modules. Using unique magnetically coupled transfer devices, wafers can be repeatedly loaded and removed without breaking vacuum. Along with the standard product lines shown, Transfer Engineering can make modifications to standard products or design completely custom systems to meet specific customer needs. Let us know your requirements.