loadlock and transfer system
Loadlock/Transfer

These high-vacuum compatible loadlocks are designed to load wafers or other substrates into a SEMI-MESC compatible or custom process modules. Using unique magnetically coupled transfer devices, wafers can be repeatedly loaded and removed without breaking vacuum. Along with the standard product lines shown, Transfer Engineering can make modifications to standard products or design completely custom systems to meet specific customer needs. Let us know your requirements.
 
PMM
custom vacuum system

Loadlock and Transfer Systems for HV/UHV and Controlled Environments:

MASCOTâ„¢ Loadlock and Transfer System

MASCOT™
Loadlock and Transfer System


Single wafer introduction
Manually operated
200, 300, 450mm or custom chambers
Magnetically-coupled transporter delivery
Z-motion capability available
SEMI-standard or custom interface
Easy set-up and installation

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TEAM-Mate Loadlock and Transfer System

TEAM-Mate™
Loadlock and Transfer System


Small footprint with integrated magnetic-drive
Single wafer introduction
Motorized or manual operation
Easy set-up and installation
200, 300, 450mm or custom chambers
Z-motion capability available
SEMI-standard or custom interface
Cost-effective alternative to typical robot

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Carousel Loadlock and Delivery System

Carousel™
Loadlock and Delivery System


Cassette-based system
Cost-effective alternative to typical robot
Dual, independently controlled drives
200, 300mm or custom chambers
Unique magnetically-coupled elevator
Z-motion capability available
Automated
SMIF capability optional
Easy set-up and installation
SEMI-standard or custom interface

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custom vacuum system
precision magnetic manipulator
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loadlock and transfer system