Wafer and Substrate Introduction Loadlock and Transfer Systems for HV/UHV and Controlled Environments - Accessories

Precision Magnetic Manipulator (PMM) Add-On / Accessory

PMM Accessories

Precision Magnetic Manipulator (PMM) Add-Ons and Accessories

An assortment of vacuum accessories, add-ons and UHV devices extend the capabilities of Transfer Engineerings Precision Magnetic Manipulators. Standard accessories are shown below. Several customer specific variations are shown in the Custom Systems section.

Many secondary motion accessories take advantage of the unique patented design of independent linear and rotary motions on Transfer Engineering high performance Precision Magnetic Manipulators. The DBLRP/M series of PMM uses two independent shafts—a round rotation shaft contained within a strong, hollow, square, linear tube allowing numerous variations in sample movement. Both shafts travel in the linear direction as the magnet carriage is moved forward. Rotating the magnet carriage rotates the inner shaft only. This rotating shaft can be used to operate clamping devices, vertical lift mechanisms, secure locks and rotatable stages or for simple rotation.

MODEL VMTEX, TRANSFERABLE EXPERIMENTAL STATION

This versatile sample mounting system with UHV-compatible electrical connectors can be reliably transferred into a vacuum system using a magnetically-coupled manipulator and repeatedly engaged and disengaged to connectors within the chamber. The VMTEX can be fitted with heaters ranging from 3/8" to 2" in diameter that can reach temperatures up to 1600°C. To view a datasheet with descriptions and specifications of the standard VMTEX click here. These Transferable Experimental Stations can be customized with unique configurations to meet a wide range of applications.

MODEL BPBPM/F, UHV COMPATIBLE BANANA PLUGS

This versatile sample mounting system with UHV-compatible electrical connectors can be reliably transferred into a vacuum system using a magnetically-coupled manipulator and repeatedly engaged and disengaged to connectors within the chamber. The VMTEX can be fitted with heaters ranging from 3/8" to 2" in diameter that can reach temperatures up to 1600°C. To view a datasheet with descriptions and specifications of the standard VMTEX click here. These Transferable Experimental Stations can be customized with unique configurations to meet a wide range of applications.

MODEL ALDEF, DYNAMIC END EFFECTOR

For use in a chamber with no vertical lift capability, a Dynamic End Effector attached to a Precision Magnetic Manpulator, can deliver a substrate into a vacuum system and lower that substrate onto the receiving stage within the process chamber. After processing, the ALDEF returns to lift the substrate to be withdrawn for removal. Standard Dynamic End Effectors are available with .276, 0.5 and 1.0 inch vertical motion.

MLRLM, GUIDE ROD AND ROTATIONAL LOCK DEVICE

On manually operated magnetically-coupled manipulators, motion is controlled by gliding the magnet carriage along the manipulator tube or rotating the magnet carriage. An optional linear guide rod with a rotational locking device is available to prevent rotation while moving in the linear direction.

BHRSS, SECOND ROTARY MOTION

The BHRSS provides a second rotary motion when used with a DBLRP or DBLRM manipulator. Applications for the BHRSS option include flexing a pincher to grab a sample, moving it in a linear motion and then twisting it 90 degrees to go from a horizontal to vertical orientation or to operate a shutter.

MODEL CSS, CARRIAGE STOP SWITCH

The Stop Switch accessory works with all of our PMM systems. It provides an electrical signal when the magnet carriage reaches the stop switch so that the PMM can be interlocked to the system control. Applications include restricting the gate valve from closing before the PMM has been retracted or permitting a stage to move in a vertical motion only when the PMM is in position.

MODEL RAIS, ROTATIONAL ANGLE INDICATOR STOP

The Model RAIS serves as an end-stop plus the notch on the Rotational Angle Indicator Stop provides a positioning guide using the 360° etched markings on the magnet carriages. The RAIS is locked in position with the turn of a hex nut and the stop location can be easily changed.

PMM BAKEABLE MAGNETS

The magnet carriage must be removed prior to bake on a standard Precision Magnetic Manipulator. An option when ordering a PMM is to replace the standard magnets in the carriage with bakeable magnets. Bakeable magnets reduce the maximum linear force and rotary torque by approximately 20%.

MOTOR DRIVES

Motors, Controllers and Mechanical Drive Assemblies provide motorized control for Transfer Engineering manipulators. The motors can be either computer controlled or controlled with a remote joystick. They can be mounted in different configurations to accommodate installations where space is at a premium.

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