loadlock and transfer system
UHV PMMs

Transfer Engineerings line of patented Precision Magnetic Manipulator (PMM) devices are used in high and ultra-high vacuum and controlled environment applications such as thin film process tools, analytical systems and surface science research tools. PMMs are precise, robust and low maintenance. Magnetic transporters with linear or linear/rotary motions are used for applications such as sample introduction, moving substrates or sample manipulation. Rotary feedthroughs can actuate shutters, rotate a sample carrier or drive planetary stages. PMMs can be incorporated into loadlock systems designed for wafer or sample introduction, positioning and removal.

PMMs can be operated manually or combined with motorized drive assemblies. Along with the standard products shown, a great deal of our work is the modification of standard or completely custom systems to meet specific customer needs. Let us know your requirements.

 
PMM
custom vacuum system

UHV Compatible, Precision Magnetic Manipulators:

ACCESSORIES

VMTEX
BPBPM/F
MLRLM
LOCK
HD FBA
ALDEF
BHRSS
CSS CARRIAGE STOP SWITCH
RAIS STOP
BAKEABLE MAGNETS
MOTOR DRIVES
High Performance Models-DBLRP/DBLRM-Linear-Rotary Motion-DBLOP/DBLOM-Linear-Only Motion

High Performance Models:
DBLRP/DBLRM: Linear-Rotary Motion
DBLOP/DBLOM: Linear-Only Motion

Patented independent linear/rotary
Manually operated
26 lb decoupling force linear
12 in-lb rotary torque
Low droop heavy-duty square linear shaft
Customer specified shaft lengths
All UHV Compatible-Bakeable to 250ƒ

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PMM-Lite Model MASLR-Linear/Rotary Motion

PMM-Lite Model MASLR:
MASLR: Linear/Rotary Motion


Single-shaft
13 lb decoupling force linear
8 in-lb rotary torque
Customer specified travel lengths
All UHV Compatible Bakeable to 250ƒ

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Model DBROP/M-Rotary Only Motion

Model DBROP/M
Rotary Only Motion


UHV Compatible - Bakeable to 250ƒC
Customer specified shaft lengths
Customizable choices include:
Dual rotating shafts
Hollow or solid shaft
Varied shaft diameters & materials

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UHV Compatible, Precision Magnetic Manipulators:
Model MCTS Wobble Stick-Linear or Linear with Rotation

Model MCTS Wobble Stick
Linear or Linear with Rotation

Single-shaft
4 lb decoupling force linear
UHV Compatible
Customizable
Bakeable to 250ƒC

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PMM
custom vacuum system

HV Compatible,
Magnetically-
Coupled Transporters:
Model DBROP/M-Rotary Only Motion

Model MAHVM, Linear-Rotary
HV Magnetically-Coupled Transporter


Single-shaft
HV Compatible
10 lb decoupling force linear
8 in-lb rotary torque
Customer specified shaft lengths
Bakeable to 150ƒC

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precision magnetic manipulator
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