loadlock and transfer system
New Products at Transfer Engineering

Ozone Assisted Oxide MBE System

This multi-chamber custom designed system was fabricated for Argonne National Laboratory. It has two main MBE chambers and a sample preparation chamber, accessed through a loadlock. The system is designed to handle 2” wafers. The prep chamber is used for oxidation and annealing processes. The sample can then be transferred via a UHV trolley to two oxide-MBE systems with multiple effusion cells that can be used for growing multi-layers of oxide materials. The trolley was made long enough to allow for the addition of a third MBE system in the future. Unique composite materials can be produced in either or both MBE systems.

precision magnetic manipulator
custom vacuum system

Dual Directional Carousel 485 with Multi-Chamber Cassette Loadlock
Dual Directional Carousel 485 with Multi-Chamber Cassette Loadlock
The Dual Directional Carousel 485 with attached Dual Chamber Cassette Loadlock is another example of the Transfer Engineering and Manufacturing (TEAM) line of standard and custom loadlock, vacuum transfer and positioning systems. In the loadlock, 485mm substrates can be loaded into the 12 level cassette held in the cassette elevator. Any of the twelve substrates can be selected and moved to the bakeout chamber or after pump down it can be transferred through a gate valve onto a delivery arm within the Carousel 485. Two heavy-duty, motorized, magnetically-coupled drives deliver the substrate into either of two process chambers on opposing sides of the Carousel system. The Carousel maintains UHV levels throughout the transfer process acting as a buffer between the process chambers and the cassette loader. This customized system is capable of handling customer-specified substrates with either a 370mm or 480mm diameter.
custom vacuum system

450mm MASCOT Single-Substrate Loadlock System
450mm MASCOT LOADLOCK SYSTEM
The new MASCOT 450 Loadlock System was designed to meet the need for introduction of the supersized 450mm wafers. This manually-operated loadlock and transfer system enables users to manually load wafers or other flat substrates up to 450mm into a SEMI-standard or custom process module without breaking vacuum. Similar to the same proven design characteristics as the smaller MASCOT systems, the loadlock chamber is machined from a single piece of aluminum avoiding joints for potential contamination. The newly designed “Tilt and Glide” load door retracts smoothly for ease of wafer insertion/removal. A patented multi-motion magnetically-coupled manipulator transports the wafer into the process tool chamber. Adding a Dynamic End Effector to the manipulator provides vertical motion allowing users to pick up/drop off wafers in a process chamber that has no vertical motion capability. The MASCOT’s valve interface can be easily modified to mate with a wide variety of process chamber gate valves.
custom vacuum system

UHV-compatible Rack and Pinion Transporter
UHV-compatible Rack and Pinion Transporter
The Model DMRAP, UHV compatible two-axis robot can be driven manually using magnetic rotary manipulators from outside the vacuum system, or motorized using UHV compatible stepper motors inside the vacuum system. The Model DMRAP has a full ±190° of rotational motion with better than .01° rotational resolution and repeatability, 0.001" linear resolution and repeatability, and up to 50" delivery distance from the center of the robot. This is designed to handle substrates up to 5 lbs. with minimal droop, The system is bakeable to 200°C. HOME and EXTEND UHV optical limit switches verify positioning.

Motorized units can be provided with our Model ALMCS-2 dual axis stepper motor control system with color touch screen HMI for operation through the front panel of the controller or via RS232 communication.

Substrate paddles of different size and materials available on request.
PMM
custom vacuum system

TEAM-Mate 450
TEAM-Mate 450
This compact, high-vacuum compatible, single-substrate loadlock system is designed to load wafers or other flat substrates into a SEMI-standard or custom process chamber. This small footprint system can mimic the motions of a robot at significantly less cost.

Typically the TEAM-Mate Loadlock would be mounted to a gate valve attached to a main system chamber. A substrate can then be easily positioned through the large entry door onto the transfer stage in the loadlock chamber. The loadlock would then be evacuated to the desired vacuum level, the gate valve opened and the substrate transferred into the process chamber. This allows repeated substrate loading and unloading without breaking vacuum in the main chamber greatly reducing process time.

TEAM-Mate Loadlock More info...
PMM
custom vacuum system

UHV Compatible Optical Limit Switch
UHV Compatible Optical Limit Switch
The Model MAOLS is available for use as a "HOME" or "position confirmed" optical limit switch based on proven Honeywell LED and optical transistor devices. Similar to the widely used Omron SX series photomicrosensors, but fabricated from ultra-high vacuum (UHV) compatible materials and hermetically sealed components, these limit switches are turned on/off by a flag interrupting a narrow beam which provides a very reliable, non-mechanical repeatable switch. The signal conditioning PC board on the MAOLS will convert signals from the sensor. The signal is ready for interfacing to your PLC or other process control instrumentation. The MAOLS will operate in temperature ranges from -55°C to 125°C.

More information on the Model MAOLS
precision magnetic manipulator
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loadlock and transfer system