New Products at Transfer Engineering
TEAM-Mate 450
This compact, high-vacuum compatible, single-substrate loadlock system is designed to load wafers or other flat substrates into a SEMI-standard or custom process chamber. This small footprint system can mimic the motions of a robot at significantly less cost.
Typically the TEAM-Mate Loadlock would be mounted to a gate valve attached to a main system chamber. A substrate can then be easily positioned through the large entry door onto the transfer stage in the loadlock chamber. The loadlock would then be evacuated to the desired vacuum level, the gate valve opened and the substrate transferred into the process chamber. This allows repeated substrate loading and unloading without breaking vacuum in the main chamber greatly reducing process time.
TEAM-Mate Loadlock More info...
