loadlock and transfer system

Transfer Engineering and Manufacturing, Inc. (TEAM)
Press Releases
November 11, 2011
full release
Transfer Engineering offers new small footprint transfer and loadlock system for next generation 450mm wafers.

Transfer Engineering and Manufacturing, a leading designer and manufacturer of vacuum transfer and positioning systems, announces the TEAM-Mate 450, a compact, high vacuum compatible, single substrate loadlock system designed to load wafers or other flat substrates up to 450mm into a SEMI MESC-standard or custom process module.
June 24, 2008
full release
Transfer Engineering Provides NREL with a Unique Sample Transfer Station for Integration to an AFM Tool -- Transfer Stations for XPS and SEM Tools with "Sample Flip" Capability to Follow

Transfer Engineering and Manufacturing (TEAM) shipped the first of three UHV transfer stations to the National Renewable Energy Lab (NREL). This system contains a cassette for handling and positioning six unique sample platens that can be delivered one at a time to either a HV compatible portable POD or to a loadlock residing within a glove box for removal to an AFM system. The portable POD was manufactured by TEAM and shipped to NREL in 2006.
August 15, 2007
full release
Transfer Engineering Devices Aboard Historic Phoenix Mars Mission - Partners with JPL on Key Soil Analysis Tool as Mission Searches for Water on Mars

Supporting the first mission to the polar regions of Mars, Transfer Engineering's innovative vacuum technology is aboard NASA's Phoenix spacecraft, which launched August 4 from Cape Canaveral Air Force Station in Florida. The Phoenix spacecraft includes a Microscopy, Electrochemistry, and Conductivity Analyzer (MECA) provided by Jet Propulsion Laboratory (JPL). JPL, a leader in the robotic exploration of the solar system, designed the MECA instrument and integrated Transfer Engineering's Sample Wheel & Translation Stage into the instrument, which is used to characterize the soil of Mars much like a gardener would test the soil in his or her yard.
May 7, 2007
full release
Transfer Engineering Announces the Bridge Offset Tool (BOT), a Cost-Effective, Loadlock and Transfer System for Bridging Process Modules.

The Transfer Engineering Bridge Offset Tool can receive a 200mm wafer at one transfer plane and transfer it into a 300mm process module at a different transfer plane. The BOT can also be used as a single wafer process tool.
April 20, 2005
full release
New CAROUSEL 200TM Cassette-Based, Small Footprint, Wafer Transfer and Loadlock System Offers Cost-Effective Alternative to Typical Robot.

Dual, independently controlled drives increase throughput on compact, SEMI-MESC-compatible, cassette-based loadlock system.
January 1, 2005
full release
Transfer Engineering Moves to Expanded Facilities.

The new building fills need for expanded engineering and assembly areas while adding a product demonstration center and enlarged cleanroom area.
August 27, 2003
full release
Transfer Engineering Expands its line of Small Footprint Wafer Transfer and Loadlock Systems with the TEAM-MateTM Cassette 300.

Compact, SEMI MESC-compatible, cassette-based loadlock system performs wafer transport motions similar to a costly cluster-tool robot.
November 21, 2001
full release
Transfer Engineering Offers New Small Footprint Wafer Transfer and Loadlock System.

Compact, SEMI MESC-compatible, loadlock system performs wafer transport motions similar to a costly cluster-tool robot.
August 25, 2000
full release
Transfer Engineering and Manufacturing, Inc. acquires Vacuum Products Group from Surface/Interface.

Company develops quality, unique, alternatives to meet specific customer needs while maintaining standard HV and UHV components, loadlocks and sample transfer systems.

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loadlock and transfer system