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Wafer Loadlock
and Transfer Systems

MASCOT™
Loadlock and Transfer System

TEAM-Mate™
Loadlock and Transfer System

Cassette-Based Loadlock and Transfer Systems

Carousel™
Loadlock and Delivery System

Vacuum Cassette Elevator (VCE)

Vacuum Platforms

Wafer Cleaning Tool

Custom Exposure System

Reticle Positioning System

NREL Transfer Stations

Vacuum Suitcase

PHI One-Inch Puck

NREL Transport Pod

NIST – OMICRON

University Large Substrate

 

Ultra-High
Vacuum Transporters

DBLOP/DBLOM
High Performance Linear-Only Motion

DBLRP/DBLRM
High Performance Linear/Rotary Motion

MASLR
Linear/Rotary Manipulator

DBROP/M
Rotary Only Motion

MCTS-LO
Transfer Stick (wobble stick - linear/angular motion)

MCTS-LR
Transfer Stick (wobble stick - linear/rotary/angular motion)

High Vacuum Transporters

Model MAHVM
(linear-rotary)


Motorization

Motor/Driver/Power Supply Packages

Mechanical Drive Assemblies
 

Vacuum Transporter Accessories

MLRLM
Guide Rod and Rotational Carriage Lock

CSS-LO
Limit Switch for Linear-Only Manipulators

CSS-LR
Limit Switch for Linear/Rotary Manipulators

BHRSS
Second Rotary Motion for DBLRP & DBLRM

ALDEF
Dynamic End Effector

RAIS
Rotary Angle Indicator Stop

PMMBM
Bakeable Magnets

MOTOR
Motorization

UHV Heating Stages

VMTEX
Transfer Experimental Station

BPBPM/BPBPF
UHV Compatible Banana Plugs