Wafer Loadlock
and Transfer Systems
MASCOT
Loadlock and Transfer System
TEAM-Mate
Loadlock and Transfer System
Cassette-Based Loadlock and Transfer Systems
Carousel
Loadlock and Delivery System
Vacuum Cassette Elevator (VCE)
and Transfer Systems
MASCOT
Loadlock and Transfer System
TEAM-Mate
Loadlock and Transfer System
Cassette-Based Loadlock and Transfer Systems
Carousel
Loadlock and Delivery System
Vacuum Cassette Elevator (VCE)
Ultra-High
Vacuum Transporters
DBLOP/DBLOM
High Performance Linear-Only Motion
DBLRP/DBLRM
High Performance Linear/Rotary Motion
MASLR
Linear/Rotary Manipulator
DBROP/M
Rotary Only Motion
MCTS-LO
Transfer Stick (wobble stick - linear/angular motion)
MCTS-LR
Transfer Stick (wobble stick - linear/rotary/angular motion)
High Vacuum Transporters
Model MAHVM
(linear-rotary)
Motorization
Motor/Driver/Power Supply Packages
Mechanical Drive Assemblies
Vacuum Transporters
DBLOP/DBLOM
High Performance Linear-Only Motion
DBLRP/DBLRM
High Performance Linear/Rotary Motion
MASLR
Linear/Rotary Manipulator
DBROP/M
Rotary Only Motion
MCTS-LO
Transfer Stick (wobble stick - linear/angular motion)
MCTS-LR
Transfer Stick (wobble stick - linear/rotary/angular motion)
High Vacuum Transporters
Model MAHVM
(linear-rotary)
Motorization
Motor/Driver/Power Supply Packages
Mechanical Drive Assemblies
Vacuum Transporter Accessories
MLRLM
Guide Rod and Rotational Carriage Lock
CSS-LO
Limit Switch for Linear-Only Manipulators
CSS-LR
Limit Switch for Linear/Rotary Manipulators
BHRSS
Second Rotary Motion for DBLRP & DBLRM
ALDEF
Dynamic End Effector
RAIS
Rotary Angle Indicator Stop
PMMBM
Bakeable Magnets
MOTOR
Motorization
UHV Heating Stages
VMTEX
Transfer Experimental Station
BPBPM/BPBPF
UHV Compatible Banana Plugs
MLRLM
Guide Rod and Rotational Carriage Lock
CSS-LO
Limit Switch for Linear-Only Manipulators
CSS-LR
Limit Switch for Linear/Rotary Manipulators
BHRSS
Second Rotary Motion for DBLRP & DBLRM
ALDEF
Dynamic End Effector
RAIS
Rotary Angle Indicator Stop
PMMBM
Bakeable Magnets
MOTOR
Motorization
UHV Heating Stages
VMTEX
Transfer Experimental Station
BPBPM/BPBPF
UHV Compatible Banana Plugs