loadlock and transfer system
Vacuum Suitcase    NIST

NIST Omicron Multi-level Vacuum Suitcase

This portable vacuum system located at NIST is intended for in-vacuum sample transportation between multiple measurement and fabrication stations. The suitcase is a complete autonomous system mounted on a mobile cart with vertical adjustability for multiple sample transfer heights. It includes a storage chamber, buffer (interstitial) chamber, sample transporter, valves, pumps and gauges with the respective controllers and power supplies.

The system has a UPS (uninterruptible power supply) to maintain power for the ion pump and gauges for periods longer than an hour. The linear/rotary magnetic manipulator has a pincher grip for the handling of Omicron style sample holders, but pincher grips or lift devices could be fabricated for any number of different types of transfers.
precision magnetic manipulator
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loadlock and transfer system